MTF-Pro Software for the MTF Measurement of Optical Wafers

The recognized ImageMaster® PRO software, called MTF-Pro, has been further improved. It features increased speed, advanced performance and clearly displayed test results. The optimized MTF algorithms are the result of the continuous improvement and TRIOPTICS’ years of experience in the field of MTF measurement. For wafer optics measurement the software provides a special tool for the alignment of the wafer.


  • Recognition of wafer marks and control of wafer alignment
  • Generation of a testing pattern depending on the wafer specification
  • Integration of an optical sensor for wafer bow measurement and highest accuracy of flange focal length (FFL)
  • Mapping of the wafer in order to determine the dimensions of the spacers
  • Bow compensation scan algorithms
  • Generation of appropriate masks for wafer testing